<?xml version="1.0" encoding="UTF-8" standalone="no"?><ContractAwardNotice xmlns="urn:oasis:names:specification:ubl:schema:xsd:ContractAwardNotice-2" xmlns:cac="urn:oasis:names:specification:ubl:schema:xsd:CommonAggregateComponents-2" xmlns:cbc="urn:oasis:names:specification:ubl:schema:xsd:CommonBasicComponents-2" xmlns:efac="http://data.europa.eu/p27/eforms-ubl-extension-aggregate-components/1" xmlns:efbc="http://data.europa.eu/p27/eforms-ubl-extension-basic-components/1" xmlns:efext="http://data.europa.eu/p27/eforms-ubl-extensions/1" xmlns:ext="urn:oasis:names:specification:ubl:schema:xsd:CommonExtensionComponents-2" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance">
   <ext:UBLExtensions>
      <ext:UBLExtension>
         <ext:ExtensionContent>
            <efext:EformsExtension>
               <efac:NoticeResult>
                  <cbc:TotalAmount currencyID="EUR">1052136.57</cbc:TotalAmount>
                  <efac:LotResult>
                     <cbc:ID schemeName="result">RES-0001</cbc:ID>
                     <cbc:TenderResultCode listName="winner-selection-status">selec-w</cbc:TenderResultCode>
                     <efac:LotTender>
                        <cbc:ID schemeName="tender">TEN-0001</cbc:ID>
                     </efac:LotTender>
                     <efac:ReceivedSubmissionsStatistics>
                        <efbc:StatisticsCode listName="received-submission-type">tenders</efbc:StatisticsCode>
                        <efbc:StatisticsNumeric>1</efbc:StatisticsNumeric>
                     </efac:ReceivedSubmissionsStatistics>
                     <efac:SettledContract>
                        <cbc:ID schemeName="contract">CON-0001</cbc:ID>
                     </efac:SettledContract>
                     <efac:TenderLot>
                        <cbc:ID schemeName="Lot">LOT-0001</cbc:ID>
                     </efac:TenderLot>
                  </efac:LotResult>
                  <efac:LotTender>
                     <cbc:ID schemeName="tender">TEN-0001</cbc:ID>
                     <cac:LegalMonetaryTotal>
                        <cbc:PayableAmount currencyID="EUR">1052136.57</cbc:PayableAmount>
                     </cac:LegalMonetaryTotal>
                     <efac:SubcontractingTerm>
                        <efbc:TermCode listName="applicability">not-known</efbc:TermCode>
                     </efac:SubcontractingTerm>
                     <efac:TenderingParty>
                        <cbc:ID schemeName="tendering-party">TPA-0001</cbc:ID>
                     </efac:TenderingParty>
                     <efac:TenderLot>
                        <cbc:ID schemeName="Lot">LOT-0001</cbc:ID>
                     </efac:TenderLot>
                     <efac:TenderReference>
                        <cbc:ID>00000222</cbc:ID>
                     </efac:TenderReference>
                  </efac:LotTender>
                  <efac:SettledContract>
                     <cbc:ID schemeName="contract">CON-0001</cbc:ID>
                     <cbc:AwardDate>2026-06-30+02:00</cbc:AwardDate>
                     <cbc:IssueDate>2026-06-30+02:00</cbc:IssueDate>
                     <cac:SignatoryParty>
                        <cac:PartyIdentification>
                           <cbc:ID schemeName="organization">ORG-0001</cbc:ID>
                        </cac:PartyIdentification>
                     </cac:SignatoryParty>
                     <efac:ContractReference>
                        <cbc:ID>Projekt: KSI E-LINE 100</cbc:ID>
                     </efac:ContractReference>
                     <efac:LotTender>
                        <cbc:ID schemeName="tender">TEN-0001</cbc:ID>
                     </efac:LotTender>
                  </efac:SettledContract>
                  <efac:TenderingParty>
                     <cbc:ID schemeName="tendering-party">TPA-0001</cbc:ID>
                     <cbc:Name>Raith GmbH</cbc:Name>
                     <efac:Tenderer>
                        <cbc:ID schemeName="organization">ORG-0101</cbc:ID>
                     </efac:Tenderer>
                  </efac:TenderingParty>
               </efac:NoticeResult>
               <efac:NoticeSubType>
                  <cbc:SubTypeCode listName="notice-subtype">29</cbc:SubTypeCode>
               </efac:NoticeSubType>
               <efac:Organizations>
                  <efac:Organization>
                     <efac:Company>
                        <cbc:WebsiteURI>www.ksi-sensors.de</cbc:WebsiteURI>
                        <cac:PartyIdentification>
                           <cbc:ID schemeName="organization">ORG-0001</cbc:ID>
                        </cac:PartyIdentification>
                        <cac:PartyName>
                           <cbc:Name languageID="DEU">Kurt-Schwabe-Institut für Mess- und Sensortechnik Meinsberg e.V.</cbc:Name>
                        </cac:PartyName>
                        <cac:PostalAddress>
                           <cbc:StreetName>Kurt-Schwabe-Straße 4</cbc:StreetName>
                           <cbc:CityName>Waldheim</cbc:CityName>
                           <cbc:PostalZone>04736</cbc:PostalZone>
                           <cbc:CountrySubentityCode listName="nuts">DED43</cbc:CountrySubentityCode>
                           <cac:Country>
                              <cbc:IdentificationCode listName="country">DEU</cbc:IdentificationCode>
                           </cac:Country>
                        </cac:PostalAddress>
                        <cac:PartyLegalEntity>
                           <cbc:CompanyID>VR 5308</cbc:CompanyID>
                        </cac:PartyLegalEntity>
                        <cac:Contact>
                           <cbc:Name>Kurt-Schwabe-Institut für Mess- und Sensortechnik Meinsberg e.V.</cbc:Name>
                           <cbc:Telephone>034327608 150</cbc:Telephone>
                           <cbc:Telefax>034327 608131</cbc:Telefax>
                           <cbc:ElectronicMail>ulrich.rant@ksi-sensors.de</cbc:ElectronicMail>
                        </cac:Contact>
                     </efac:Company>
                  </efac:Organization>
                  <efac:Organization>
                     <efac:Company>
                        <cbc:WebsiteURI>www.raith.com</cbc:WebsiteURI>
                        <efbc:CompanySizeCode listName="economic-operator-size">medium</efbc:CompanySizeCode>
                        <cac:PartyIdentification>
                           <cbc:ID schemeName="organization">ORG-0101</cbc:ID>
                        </cac:PartyIdentification>
                        <cac:PartyName>
                           <cbc:Name languageID="DEU">Raith GmbH</cbc:Name>
                        </cac:PartyName>
                        <cac:PostalAddress>
                           <cbc:StreetName>Konrad-Adenauer-Allee 8</cbc:StreetName>
                           <cbc:CityName>Dortmund</cbc:CityName>
                           <cbc:PostalZone>44263</cbc:PostalZone>
                           <cbc:CountrySubentityCode listName="nuts">DEA52</cbc:CountrySubentityCode>
                           <cac:Country>
                              <cbc:IdentificationCode listName="country">DEU</cbc:IdentificationCode>
                           </cac:Country>
                        </cac:PostalAddress>
                        <cac:PartyLegalEntity>
                           <cbc:CompanyID>Ust.-ID-Nr.: DE 124727 617</cbc:CompanyID>
                        </cac:PartyLegalEntity>
                        <cac:Contact>
                           <cbc:Name>Raith GmbH</cbc:Name>
                           <cbc:Telephone>0231 95004-0</cbc:Telephone>
                           <cbc:ElectronicMail>sales@raith.de</cbc:ElectronicMail>
                        </cac:Contact>
                     </efac:Company>
                  </efac:Organization>
               <efac:Organization><efac:Company><cac:PartyIdentification><cbc:ID schemeName="organization">ORG-0102</cbc:ID></cac:PartyIdentification><cac:PartyName><cbc:Name languageID="DEU">Datenservice Öffentlicher Einkauf (in Verantwortung des Beschaffungsamts des BMI)</cbc:Name></cac:PartyName><cac:PostalAddress><cbc:CityName>Bonn</cbc:CityName><cbc:PostalZone>53119</cbc:PostalZone><cbc:CountrySubentityCode listName="nuts">DEA22</cbc:CountrySubentityCode><cac:Country><cbc:IdentificationCode listName="country">DEU</cbc:IdentificationCode></cac:Country></cac:PostalAddress><cac:PartyLegalEntity><cbc:CompanyID schemeID="002">0204:994-DOEVD-83</cbc:CompanyID></cac:PartyLegalEntity><cac:Contact><cbc:Telephone>+49228996100</cbc:Telephone><cbc:ElectronicMail>noreply.esender_hub@bescha.bund.de</cbc:ElectronicMail></cac:Contact></efac:Company></efac:Organization></efac:Organizations>
            <efac:Publication><efbc:NoticePublicationID schemeName="ojs-notice-id">00455485-2026</efbc:NoticePublicationID><efbc:GazetteID schemeName="ojs-id">125/2026</efbc:GazetteID><efbc:PublicationDate>2026-07-02+02:00</efbc:PublicationDate></efac:Publication></efext:EformsExtension>
         </ext:ExtensionContent>
      </ext:UBLExtension>
   </ext:UBLExtensions>
   <cbc:UBLVersionID>2.3</cbc:UBLVersionID>
   <cbc:CustomizationID>eforms-sdk-1.13</cbc:CustomizationID>
   <cbc:ProfileID>eforms-sdk-1.13</cbc:ProfileID>
   <cbc:ID schemeName="notice-id">019ef482-c357-4f03-aba3-95f65cf18579</cbc:ID>
   <cbc:ContractFolderID>019e0178-f4b2-4d65-9d09-68ed63f910bf</cbc:ContractFolderID>
   <cbc:IssueDate>2026-06-30+02:00</cbc:IssueDate>
   <cbc:IssueTime>15:29:03+02:00</cbc:IssueTime>
   <cbc:VersionID>01</cbc:VersionID>
   <cbc:RequestedPublicationDate>2026-06-30+02:00</cbc:RequestedPublicationDate>
   <cbc:RegulatoryDomain>32014L0024</cbc:RegulatoryDomain>
   <cbc:NoticeTypeCode listName="result">can-standard</cbc:NoticeTypeCode>
   <cbc:NoticeLanguageCode listName="language">DEU</cbc:NoticeLanguageCode>
   <cac:ContractingParty>
      <cbc:BuyerProfileURI>www.evergabe.de</cbc:BuyerProfileURI>
      <cac:ContractingPartyType>
         <cbc:PartyTypeCode listName="buyer-legal-type">body-pl-ra</cbc:PartyTypeCode>
      </cac:ContractingPartyType>
      <cac:ContractingActivity>
         <cbc:ActivityTypeCode listName="authority-activity">education</cbc:ActivityTypeCode>
      </cac:ContractingActivity>
      <cac:Party>
         <cac:PartyIdentification>
            <cbc:ID schemeName="organization">ORG-0001</cbc:ID>
         </cac:PartyIdentification>
      <cac:ServiceProviderParty><cbc:ServiceTypeCode listName="organisation-role">ted-esen</cbc:ServiceTypeCode><cac:Party><cac:PartyIdentification><cbc:ID schemeName="organization">ORG-0102</cbc:ID></cac:PartyIdentification></cac:Party></cac:ServiceProviderParty></cac:Party>
   </cac:ContractingParty>
   <cac:TenderingTerms>
      <cac:ProcurementLegislationDocumentReference>
         <cbc:ID>vgv</cbc:ID>
         <cbc:DocumentDescription languageID="DEU">Sächsische Vergabeordnung</cbc:DocumentDescription>
      </cac:ProcurementLegislationDocumentReference>
      <cac:ProcurementLegislationDocumentReference>
         <cbc:ID>CrossBorderLaw</cbc:ID>
         <cbc:DocumentDescription languageID="DEU">Lieferung, Installierung und Inbetriebnahme einer Elektronenstrahl-Lithografieanlage (E-beam-System)</cbc:DocumentDescription>
      </cac:ProcurementLegislationDocumentReference>
   </cac:TenderingTerms>
   <cac:TenderingProcess>
      <cbc:Description languageID="DEU">EU Ausschreibung</cbc:Description>
      <cbc:ProcedureCode listName="procurement-procedure-type">open</cbc:ProcedureCode>
      <cbc:TerminatedIndicator>true</cbc:TerminatedIndicator>
      <cac:ProcessJustification>
         <cbc:ProcessReasonCode listName="accelerated-procedure">false</cbc:ProcessReasonCode>
      </cac:ProcessJustification>
   </cac:TenderingProcess>
   <cac:ProcurementProject>
      <cbc:ID>2026-1</cbc:ID>
      <cbc:Name languageID="DEU">Lieferung einer Elektronenstrahl-Lithografieanlage (E-Beam-System)</cbc:Name>
      <cbc:Description languageID="DEU">Lieferung einer Elektronenstrahl-Lithografieanlage (E-Beam-System)</cbc:Description>
      <cbc:ProcurementTypeCode listName="contract-nature">supplies</cbc:ProcurementTypeCode>
      <cac:MainCommodityClassification>
         <cbc:ItemClassificationCode listName="cpv">31712100</cbc:ItemClassificationCode>
      </cac:MainCommodityClassification>
      <cac:RealizedLocation>
         <cac:Address>
            <cbc:StreetName>Kurt-Schwabe-Institut für Mess- und Sensortechnik Meinsberg e.V.
Kurt-Schwabe-Straße 4</cbc:StreetName>
            <cbc:CityName>Waldheim / Germany</cbc:CityName>
            <cbc:PostalZone>04736</cbc:PostalZone>
            <cbc:CountrySubentityCode listName="nuts">DED43</cbc:CountrySubentityCode>
            <cac:Country>
               <cbc:IdentificationCode listName="country">DEU</cbc:IdentificationCode>
            </cac:Country>
         </cac:Address>
      </cac:RealizedLocation>
   </cac:ProcurementProject>
   <cac:ProcurementProjectLot>
      <cbc:ID schemeName="Lot">LOT-0001</cbc:ID>
      <cac:TenderingTerms>
         <ext:UBLExtensions>
            <ext:UBLExtension>
               <ext:ExtensionContent>
                  <efext:EformsExtension>
                     <efac:StrategicProcurement>
                        <efbc:ApplicableLegalBasis listName="cvd-scope">false</efbc:ApplicableLegalBasis>
                     </efac:StrategicProcurement>
                     <efac:StrategicProcurement>
                        <efbc:ApplicableLegalBasis listName="eed-scope">false</efbc:ApplicableLegalBasis>
                     </efac:StrategicProcurement>
                  </efext:EformsExtension>
               </ext:ExtensionContent>
            </ext:UBLExtension>
         </ext:UBLExtensions>
         <cbc:FundingProgramCode listName="eu-funded">eu-funds</cbc:FundingProgramCode>
         <cac:ContractExecutionRequirement>
            <cbc:ExecutionRequirementCode listName="fsr">false</cbc:ExecutionRequirementCode>
         </cac:ContractExecutionRequirement>
         <cac:AwardingTerms>
            <cac:AwardingCriterion>
               <cbc:CalculationExpression languageID="DEU">Auswertung der im Leistungsverzeichnis abgebildeten Bewertungsmatrix.</cbc:CalculationExpression>
               <cac:SubordinateAwardingCriterion>
                  <cbc:AwardingCriterionTypeCode listName="award-criterion-type">quality</cbc:AwardingCriterionTypeCode>
                  <cbc:Description languageID="DEU">Es wurde ein Angebot abgegeben.</cbc:Description>
               </cac:SubordinateAwardingCriterion>
            </cac:AwardingCriterion>
         </cac:AwardingTerms>
         <cac:AdditionalInformationParty>
            <cac:PartyIdentification>
               <cbc:ID schemeName="organization">ORG-0001</cbc:ID>
            </cac:PartyIdentification>
         </cac:AdditionalInformationParty>
         <cac:DocumentProviderParty>
            <cac:PartyIdentification>
               <cbc:ID schemeName="organization">ORG-0001</cbc:ID>
            </cac:PartyIdentification>
         </cac:DocumentProviderParty>
         <cac:AppealTerms>
            <cac:PresentationPeriod>
               <cbc:Description languageID="DEU">entfällt</cbc:Description>
            </cac:PresentationPeriod>
            <cac:AppealInformationParty>
               <cac:PartyIdentification>
                  <cbc:ID schemeName="organization">ORG-0001</cbc:ID>
               </cac:PartyIdentification>
            </cac:AppealInformationParty>
            <cac:AppealReceiverParty>
               <cac:PartyIdentification>
                  <cbc:ID schemeName="organization">ORG-0001</cbc:ID>
               </cac:PartyIdentification>
            </cac:AppealReceiverParty>
         </cac:AppealTerms>
      </cac:TenderingTerms>
      <cac:TenderingProcess>
         <cbc:GovernmentAgreementConstraintIndicator>true</cbc:GovernmentAgreementConstraintIndicator>
         <cac:AuctionTerms>
            <cbc:AuctionConstraintIndicator>false</cbc:AuctionConstraintIndicator>
         </cac:AuctionTerms>
         <cac:ContractingSystem>
            <cbc:ContractingSystemTypeCode listName="framework-agreement">none</cbc:ContractingSystemTypeCode>
         </cac:ContractingSystem>
         <cac:ContractingSystem>
            <cbc:ContractingSystemTypeCode listName="dps-usage">none</cbc:ContractingSystemTypeCode>
         </cac:ContractingSystem>
      </cac:TenderingProcess>
      <cac:ProcurementProject>
         <cbc:ID>LOT-0001</cbc:ID>
         <cbc:Name languageID="DEU">Lieferung einer Elektronenstrahl-Lithografieanlage (E-Beam-System)</cbc:Name>
         <cbc:Description languageID="DEU">Der Auftragnehmer liefert, installiert und übergibt dem Auftraggeber ein definiertes Elektronenstrahl-Lithografiesystem zur hochauflösenden Strukturierung von Mikro- und Nanostrukturen. Eine genaue Beschreibung ist dem Leistungsverzeichnis zu entnehmen.</cbc:Description>
         <cbc:ProcurementTypeCode listName="contract-nature">supplies</cbc:ProcurementTypeCode>
         <cbc:EstimatedOverallContractQuantity unitCode="H87">1</cbc:EstimatedOverallContractQuantity>
         <cbc:Note languageID="DEU">Zuwendungsbescheid</cbc:Note>
         <cac:ProcurementAdditionalType>
            <cbc:ProcurementTypeCode listName="strategic-procurement">inn-pur</cbc:ProcurementTypeCode>
            <cbc:ProcurementType languageID="DEU">Der Auftragnehmer liefert, installiert und übergibt
dem Auftraggeber nach Inbetriebnahme ein
Elektronenstrahl-Lithografiesystem, welches in
dem angefügten Leistungsverzeichnis genauer
beschrieben ist.</cbc:ProcurementType>
         </cac:ProcurementAdditionalType>
         <cac:ProcurementAdditionalType>
            <cbc:ProcurementTypeCode listName="innovative-acquisition">proc-innov</cbc:ProcurementTypeCode>
         </cac:ProcurementAdditionalType>
         <cac:ProcurementAdditionalType>
            <cbc:ProcurementTypeCode listName="accessibility">inc</cbc:ProcurementTypeCode>
         </cac:ProcurementAdditionalType>
         <cac:MainCommodityClassification>
            <cbc:ItemClassificationCode listName="cpv">31712100</cbc:ItemClassificationCode>
         </cac:MainCommodityClassification>
         <cac:RealizedLocation>
            <cac:Address>
               <cbc:StreetName>Kurt-Schwabe-Straße 4</cbc:StreetName>
               <cbc:CityName>Waldheim</cbc:CityName>
               <cbc:PostalZone>04720</cbc:PostalZone>
               <cbc:CountrySubentityCode listName="nuts">DED43</cbc:CountrySubentityCode>
               <cac:Country>
                  <cbc:IdentificationCode listName="country">DEU</cbc:IdentificationCode>
               </cac:Country>
            </cac:Address>
         </cac:RealizedLocation>
         <cac:PlannedPeriod>
            <cbc:StartDate>2026-05-12+02:00</cbc:StartDate>
            <cbc:EndDate>2026-12-21+01:00</cbc:EndDate>
         </cac:PlannedPeriod>
      </cac:ProcurementProject>
   </cac:ProcurementProjectLot>
   <cac:TenderResult>
      <cbc:AwardDate>2000-01-01+01:00</cbc:AwardDate>
   </cac:TenderResult>
</ContractAwardNotice>